Technology/Business

MBE & Epi Service

MARU L&C Co., Ltd. provides technology-driven solutions in process equipment, advanced manufacturing, and system engineering.
From technology analysis to design and implementation, we deliver optimized solutions tailored to each customer’s needs and processes.

MBE (Molecular Beam Epitaxy)

· MBE is an advanced technology that precisely deposits thin films at the atomic level under ultra-high vacuum (UHV) conditions.
· Operating under an extreme vacuum environment at approximately 10⁻⁹ Torr, MBE ensures the highest levels of purity and quality.

- Development and fabrication of an MBE system are currently underway.

[ MBE Systems Currently in Our Portfolio ]

Epi Wafer Service

· Materials : GaAs Based, GaSb Based, ZnO Based, GaN Based
· Structure : Electric Device, Optical Device
· Customized device structure for orders.

GaSb Buffer Layer
RHEED Patterns of InGaSb/InAs Superlattice
InAs QD/GaAs
ZnO LED
ZnO TCO